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Lüth, H.
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Trellenkamp, Stefan
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Moers, J.
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Lüth, H.
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Trellenkamp, Stefan
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Moers, J.
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Conference Presentation
7
Talk (non-conference)
7
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6
Contribution to a conference proceedings
6
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5
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3
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Select result number 21
21
Talk (non-conference)
Investigation of thin MOSFET gate oxides
Goryll, M.
2002
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Select result number 22
22
Contribution to a book
Contribution to a conference proceedings
Process steps for a double gate MOSFET with vertical layout
Trellenkamp, S.
2002
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23
Conference Presentation
Process steps for a double gate MOSFET with vertical layout
Trellenkamp, S.
2002
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24
Poster
Patterning of 25 nm wide silicon webs with an aspect ratio of 13
Trellenkamp, S.
2002
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25
Conference Presentation
Herstellung von Siliziumstegen im Dekananometerbereich
Trellenkamp, S.
2002
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26
Talk (non-conference)
Vertical double-gate MOSFET based on epitaxial growth by LPCVD
Moers, J.
2001
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Select result number 27
27
Conference Presentation
Nanostrukturierung und optische Lithographie mit DUV-Photoresists bei der Herstellung vertikaler MOSFETs
Trellenkamp, S.
2001
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Select result number 28
28
Contribution to a book
Contribution to a conference proceedings
Vertical double-gate MOSFET based on epitaxial growth by LPCVD
Moers, J.
2001
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Publications database
28
Document Type
Conference Presentation
7
Talk (non-conference)
7
Contribution to a book
6
Contribution to a conference proceedings
6
Journal Article
5
Poster
3
Name
Lüth, H.
Moers, J.
Trellenkamp, Stefan
Kordos, P.
25
Mantl, S.
15
Goryll, M.
14
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Marso, M.
14
van der Hart, A.
9
Hogg, S.
7
Kluth, P.
7
von der Hart, A.
7
Vescan, L.
6
Zhao, Q.-T.
5
Kluth, S.
3
Kretz, J.
2
Alvarez, D.
1
Alvarez, J.
1
Flücken, R.
1
Indlekofer, K. M.
1
Kluth, S. M.
1
Lepsa, M. I.
1
Wensorra, J.
1
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Research Program
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
24
Halbleiterbauelemente und Analytik
3
Halbleiterschichtsysteme und Mesoskopische Strukturen
3
Grundlagen für zukünftige Informationstechnologien
1
Ionen- und Lithographietechnik
1
Contributing Institute
Institut für Halbleiterschichten und Bauelemente; ISG-1
27
Halbleiter-Nanoelektronik; IBN-1
1
Institut für Bio- und Chemosensoren; ISG-2
1
JARA-FIT; JARA-FIT
1
Prozesstechnologie; IBN-PT
1
Scientific Report
2002
12
2003
8
2004
4
2001
3
2009
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