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Lüth, H.
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van der Hart, A.
2002
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Lüth, H.
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van der Hart, A.
2002
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1
Journal Article
Top contact for vertical double-gate MOSFETs
Moers, J.
2002
Microelectronic engineering, 64 (2002) S. 465 - 471
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2
Poster
Top contact for vertical double-gate MOSFETs
Moers, J.
2002
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3
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Process steps for a double gate MOSFET with vertical layout
Trellenkamp, S.
2002
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4
Journal Article
Submicrometer scale photoassisted wet etching of n-doped gallium nitride
Skriniarova, J.
2002
Journal of electrical engineering, 53 (2002) S. 105 - 107
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5
Conference Presentation
Process steps for a double gate MOSFET with vertical layout
Trellenkamp, S.
2002
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6
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Patterning of 25 nm wide silicon webs with an aspect ratio of 13
Trellenkamp, S.
2002
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7
Conference Presentation
Herstellung von Siliziumstegen im Dekananometerbereich
Trellenkamp, S.
2002
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Kordos, P.
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Lüth, H.
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Hogg, S.
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Research Program
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
7
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Institut für Halbleiterschichten und Bauelemente; ISG-1
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