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Schumacher, M. AND Waser, R.

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Schumacher, M. AND Waser, R.

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Conference Presentation 6 Contribution to a book 4 Contribution to a conference proceedings 4 Journal Article 3 Poster 3

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Contribution to a book
Contribution to a conference proceedings

Nucleation and growth of thin (Ba, Sr) TiO3 films in a MOCVD reactor

Regnery, S.
2004

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Conference Presentation

MOCVD of SrTa2O6 thin films for high-k applications

Regnery, S.
2004

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Growth of (Ba,Sr)TiO3 thin films by MOCVD: stoichiometry effects

Ehrhart, P.
2003

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Conference Presentation

Comparison of hafnium precursors for the MOCVD of HfO2 for gate dielectric applications

Teren, A. R.
2003

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Journal Article

(Ba,Sr)TiO3 thin film growth in a batch processing MOCVD reactor

Regnery, S.
2003

Journal of the European Ceramic Society, 24 (2003) S. 271-276

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Conference Presentation

MOCVD of (BaSr)TiO3: Nucleation and growth

Regnery, S.
2003

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7

Contribution to a book
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Nucleation and growth of thin (Ba,Sr)TiO3 films in a MOCVD reactor

Regnery, S.
2003

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(Ba,Sr)TiO3 thin films growth in a batch processing MOCVD reactor

Regnery, S.
2002

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Conference Presentation

Nucleation and growth of thin (Ba,Sr)TiO3 films in a MOCVD reactor

Regnery, S.
2002

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Journal Article

Growth of (Ba,Sr)TiO3 thin films by MOCVD : stoichiometry effects

Ehrhart, P.
2002

Integrated ferroelectrics, 45 (2002) S. 59 - 68

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Contribution to a book
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Growth of (Ba,Sr)TiO3 thin films in a multi-wafer MOCVD reactor

Ehrhart, P.
2001

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BST thin films grown in a multi-wafer MOCVD reactor

Fitsilis, F.
2001

Journal of the European Ceramic Society, 21 (2001) S. 1547 - 1551

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Growth of (Ba,Sr) TiO3 thin films in a multiwafer MOCVD reactor

Ehrhart, P.
2000

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Deposition of BST thin films in a multi-wafer MOCVD reactor

Ehrhart, P.
2000

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Conference Presentation

BST thin films growth in a multiwafer MOCVD reactor

Fitsilis, F.
2000

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Contribution to a book
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Charge transport dc field effects, and long-term reliability of electroceramic thin films

Hoffmann, S.
1999

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Publications database 16

Conference Presentation 6 Contribution to a book 4 Contribution to a conference proceedings 4 Journal Article 3 Poster 3

Schumacher, M. Waser, R. Ehrhart, P. 14 Regnery, S. 14 Schienle, F. 11 Fitsilis, F. 10 more ... Jia, C. L. 6 Juergensen, H. 5 Dauelsberg, M. 4 Ding, Y. 4 Jürgensen, H. 4 Strzyzewski, P. 4 Lindner, J. 3 Szot, K. 3 Haselier, H. 2 Krumpen, W. 2 Lehnen, P. 2 McEntee, T. 2 Miedl, S. 2 Thomas, R. 2 Baumann, P. K. 1 Dietz, G. W. 1 Ehrhart, F. 1 Gerhardt, R. 1 Grossmann, M. 1 He, J. 1 He, J. Q. 1 Hoffmann, S. 1 Jia, C. 1 Jones, A. C. 1 see all ... less ...

Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik 10 Festkörperforschung für die Informationstechnik 6

Elektrokeramische Materialien; IFF-EKM 9 Mikrostrukturforschung; IFF-IMF 6 Institut für Festkörperforschung; IFF 4 Center of Nanoelectronic Systems for Information Technology; CNI 3 Elektronische Materialien; IFF-IEM 3 Zentralabteilung für Chemische Analysen; ZCH 1

2003 4 2000 3 2002 3 2004 3 2001 2 1999 1

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