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Elektrokeramische Materialien; IFF-EKM
Böttger, U.
Poster
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Elektrokeramische Materialien; IFF-EKM
Böttger, U.
Poster
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Select result number 1
1
Poster
Scaling of Pb(Zr,Ti)O3 thin films by the CSD method with a thickness down to 50 nm and nanosized top electrodes
Ellerkmann, U.
2003
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2
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Thickness dependence of piezoelectric properties for PZT thin films with regard to MEMS applications
Kügeler, C.
2003
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3
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Investigation of the high frequency properties of BSTO thin films - a comparison of three different commonly used measurement techniques
Tappe, S.
2003
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4
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Fast pulse switching investigations at application sized FeRAM capacitors
Kall, U.
2003
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5
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Stress induced shift of phase transition temperature in SrTiO3 and Ba0.6Sr0.4TiO3 thin films
Astafiev, K.
2003
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6
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Influence of electrode material on the interfacial capacitance and the failure mechanisms in PZT thin films
Ellerkmann, U.
2002
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6
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Poster
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Böttger, U.
Waser, R.
6
Schneller, T.
3
Ellerkmann, U.
2
Astafiev, K.
1
Bruchhaus, R.
1
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Gerber, P.
1
Ginley, D. S.
1
Hoffmann-Eifert, S.
1
Kall, U.
1
Kaydanova, T.
1
Kügeler, C.
1
Nagel, D. R.
1
Petrov, P. K.
1
Schmitz, T.
1
Setter, N.
1
Sherman, V. O.
1
Tagantsev, A. K.
1
Tappe, S.
1
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Research Program
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
6
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Elektrokeramische Materialien; IFF-EKM
Scientific Report
2003
5
2002
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