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Elektrokeramische Materialien; IFF-EKM
Waser, R.
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Kügeler, C.
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Elektrokeramische Materialien; IFF-EKM
Waser, R.
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Kügeler, C.
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1
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Thickness dependence of piezoelectric properties for PZT thin films with regard to MEMS applications
Kügeler, C.
2003
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Journal Article
Short-time piezoelectric measurements in ferroelectric thin films using a double-beam laser interferometer
Gerber, P.
2003
Review of scientific instruments, 74 (2003) S. 2613 - 2615
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Leakage current properties of Ba0,7 Sr0,3 TiO3 thin films depending on the film thickness
Kügeler, C.
2002
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Integration, electrical and electromechanical properties of PZT and PMN-Pt thin films for MEMS applications
Kügeler, C.
2002
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Integration, electrical and elctromechanical properties of PZT and PMN-Pt thin films for MEMS applications
Kügeler, C.
2002
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Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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