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1

Conference Presentation

Reduction of silicon dioxide interfacial layer to 4.6 A EOT by Al remote scavenging in high-k/metal gate stacks on Si

Nichau, Alexander
2013

“...2013...”

2

Conference Presentation

Epitaxial growth studies of SiGe and SiGeSn

Wirths, S.
2013

“...2013...”

3

Conference Presentation

Growth of graded doped Si/SiGe Heterostructure Tunnel FET

Wirths, S.
2013

“...2013...”

4

Journal Article

Photoemission spectroscopy study of the lanthanum lutetium oxide∕silicon interface

Nichau, Alexander
2013

The @journal of chemical physics, 138 (2013) 15, S. 154709

“...2013...”
OpenAccess

5

Journal Article

Effects of C+ ion implantation on electrical properties of NiSiGe/SiGe contacts

Zhang, B.
2013

Nuclear instruments & methods in physics research / B, 307 (2013) S. 408 - 411

“...2013...”

6

Journal Article

Reduction of silicon dioxide interfacial layer to 4.6 A EOT by Al remote scavenging in high K/metal gate stacks on Si

Nichau, Alexander
2013

Microelectronic engineering, 109 S. 109 - 112

“...2013...”

7

Conference Presentation

SiGeSn Growth Studies using Reduced Pressure CVD Towards Optoelectronic Applications

Wirths, Stephan
2013

“...2013...”
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