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1

Contribution to a book
Contribution to a conference proceedings

Integration, electrical and electromechanical properties of PZT and PMN-Pt thin films for MEMS applications

Kügeler, C.
2002

2

Conference Presentation

Integration, electrical and elctromechanical properties of PZT and PMN-Pt thin films for MEMS applications

Kügeler, C.
2002

3

Journal Article

Preparation and ageing behavior of chemical-solution-deposited (PbMg(0.33)Nb(0,67)O3)1-x-(PbTiO3)x thin films without seeding layers

Hoffmann, M.
2002

Journal of the American Ceramic Society, 85 (2002) S. 1867 - 1869

4

Journal Article

Relaxors as high-E- materials for multilayer and thin film capacitors

Hofer, C.
2002

Ferroelectrics, 270 (2002) S. 179 - 184

5

Journal Article

PZT thin films for piezoelectric microactuator applications

Kueppers, H.
2002

Sensors and actuators / A, 97-98 (2002) S. 680 - 684

6

Journal Article

Integration of piezoelectric PZT thin films with internal electrodes into an actuator structure for MEMS application

Hoffmann, M.
2002

Integrated ferroelectrics, 50 (2002) S. 21 - 32

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