Document Type within your search.
1
Kluth, P.
2002
Microelectronic engineering, 64 (2002) S. 163 - 171
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Materials science and engineering / B, 89 (2002) S. 73 - 76
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Kluth, P.
2002
Microelectronic engineering, 60 (2002) S. 239 - 245
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Materials science and engineering / B, 89 (2002) S. 26 - 29
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Moers, J.
2002
Microelectronic engineering, 64 (2002) S. 465 - 471
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Buca, D.
2002
Journal of applied physics, 92 (2002) S. 7599 - 7605
OpenAccess 
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Microelectronic engineering, 64 (2002) S. 443 - 448