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1
Book
Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology /
Madou
,
Marc
J
.
2012
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Madou
,
Marc
J
....
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2
Book
Manufacturing techniques for microfabrication and nanotechnology /
Madou
,
Marc
J
.
2012
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,
Marc
J
....
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3
Book
From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications /
Madou
,
Marc
J
.
2012
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,
Marc
J
....
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4
E-Book
Fundamentals of microfabrication and nanotechnology. Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications [E-Book] /
Madou
,
Marc
J
.
2011
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,
Marc
J
....
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5
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Fundamentals of microfabrication : the science of miniaturization /
Madou
,
Marc
J
.
2002
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Madou
,
Marc
J
....
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6
Book
Chemical sensing with solid state devices /
Madou
,
Marc
J
.
1989
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Madou
,
Marc
J
....
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