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Cover Image

Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators.

Laser processing of thin films and microstructures: oxidation, deposition and etching o insulators :

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Personal Name(s): Boyd, I. W.
Imprint: Berlin : Springer, 1987.
Physical Description: VIII, 320 S.
Note: englisch
ISBN: 3540179518
0387179518
9783540179511
9780387179513
Series Title: Springer series in materials science ; vol 0003.
Subject (ZB):
thin film
etching
Classification:
CUMB - Laser induced processes
FGJ - Laser and electron beam processing
CUM - Laser spectroscopy
Shelf Classification:
CUM - Laserspektroskopie
FGJ - Laserstrahl- und Elektronenstrahltechnologie
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Reading Room Call Number: CUM 029 Barcode: 1089103234 Available   
Reading Room Call Number: FGJ 028-03 Barcode: 1087106039 Available   

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