Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators.

Laser processing of thin films and microstructures: oxidation, deposition and etching o insulators :

Saved in:
Boyd, I. W.
Berlin : Springer, 1987.
VIII, 320 S.
englisch
3540179518
0387179518
9783540179511
9780387179513
Springer series in materials science ; vol 0003.

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