Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators.
Laser processing of thin films and microstructures: oxidation, deposition and etching o insulators :
Saved in:
| Personal Name(s): | Boyd, I. W. |
|---|---|
| Imprint: |
Berlin :
Springer,
1987.
|
| Physical Description: |
VIII, 320 S. |
| Note: |
englisch |
| ISBN: |
3540179518 0387179518 9783540179511 9780387179513 |
| Series Title: |
Springer series in materials science ;
vol 0003. |
| Subject (ZB): | |
| Classification: | |
| Shelf Classification: |
| LEADER | 01666cam a2200421 n 4500 | ||
|---|---|---|---|
| 001 | 118892 | ||
| 005 | 20050214190500.0 | ||
| 008 | r1987 | ||
| 020 | |a 3540179518 | ||
| 020 | |a 0387179518 | ||
| 035 | |a (Sirsi) a105806 | ||
| 084 | 0 | |a CUM - Laser spectroscopy |2 ZB | |
| 084 | 0 | |a CUMB - Laser induced processes |2 ZB | |
| 084 | 0 | |a FGJ - Laser and electron beam processing |2 ZB | |
| 084 | 1 | |a CUM - Laserspektroskopie |2 LS | |
| 084 | 1 | |a FGJ - Laserstrahl- und Elektronenstrahltechnologie |2 LS | |
| 245 | 0 | 0 | |a Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators. |
| 260 | |a Berlin : |b Springer, |c 1987. | ||
| 300 | |a VIII, 320 S. | ||
| 490 | 0 | |a Springer series in materials science ; |v vol 0003. | |
| 500 | |a englisch | ||
| 520 | |a Laser processing of thin films and microstructures: oxidation, deposition and etching o insulators : | ||
| 520 | |a interaction and kinetics | ||
| 520 | |a experimental considerations | ||
| 520 | |a laser assisted oxidation and nitridation | ||
| 520 | |a passivation by laser annealing and melting | ||
| 520 | |a laser induced deposition | ||
| 520 | |a material removal | ||
| 596 | |a 1 | ||
| 650 | 4 | |a thin film | |
| 650 | 4 | |a etching | |
| 700 | 1 | |a Boyd, I. W. | |
| 900 | |a CUM 029 | ||
| 900 | |a S 005950-0003'01' | ||
| 900 | |a FGJ 028-03 | ||
| 908 | |a Monographie, Sammelwerk | ||
| 949 | |a CUM 029 |w LC |c 1 |i 1089103234 |d 9/1/2015 |e 6/1/2015 |l STACKS |m ZB |n 11 |r Y |s Y |t ZBB |u 25/3/2009 |x ZB-C |1 PRINT |o .CIRCNOTE. nach Rückgabe umschreiben auf FGJ 28-3 | ||
| 949 | |a FGJ 028-03 |w LC |c 1 |i 1087106039 |d 22/7/2003 |e 18/6/2003 |l STACKS |m ZB |n 3 |r Y |s Y |t ZBB |u 25/3/2009 |x ZB-F |1 PRINT | ||