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Fotolithografie: Grundlagen der Mikrostrukturierung /
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Subject (ZB): “...microfabrication (for microelectronics only)...”
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Manufacturing techniques for microfabrication and nanotechnology /
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Microelectronic applications of chemical mechanical planarization /
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Li, Yuzhuo
2008
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Microchip-based assay systems : methods and applications /
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Introduction to microfluidics /
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Subject (ZB): “...microelectronics...”
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RFID-Handbuch : Grundlagen und praktische Anwendungen induktiver Funkanlagen, Transponder und kontaktloser Chipkarten /
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Micro-nanofabrication : technologies and applications /
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Cui, Zheng
2005
Subject (ZB): “...microfabrication (for microelectronics only)...”
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MST Atlas Deutschland 2005 : Mikrosystemtechnik - Cluster in Deutschland /
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Subject (ZB): “...microfabrication (for microelectronics only)...”
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Fundamentals of microfabrication : the science of miniaturization /
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Subject (ZB): “...microelectronics...”
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Principles of lithography /
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11
Electrochemical technology applications in electronics : proceedings of the Third International Symposium [on Electrochemical Technology Applications in Electronics during October 20 - 22, 1999 in Honolulu, Hawaii, as a part of the joint meeting of the Electrochemical Societies between USA and Japan ...] /
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Annual review of materials science. 30 /
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13
International Symposium on Laser Precision Microfabrication. 1 : 14-16 June 2000, Omiya, Saitana, Japan /
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Subject (ZB): “...microfabrication (for microelectronics only)...”
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Micro materials : 3rd international conference and poster exhibition : proceedings : MicroMat 2000, April 17 - 19, 2000, Berlin, Germany /
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Michel, B.
2000
Subject (ZB): “...microfabrication (for microelectronics only)...”
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Handbook of semiconductor interconnection technology /
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Techniques and industrial applications /
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Fundamental electrochemistry and physics /
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Mikroelektronik. 2. Herstellungsprozesse für integrierte Schaltungen /
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Characterization and metrology for ULSI technology : 1998 international conference Gaithersburg, Maryland [23. - 27.] March 1998 : [the 1998 International Conference on Characterization and Metrology for ULSI Technology] /
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Subject (ZB): “...microelectronics...”
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Microsystem technology in chemistry and life science /
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