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Semiconductor microchips and fabrication : a practical guide to theory and manufacturing /
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Beyond-CMOS technologies for next generation computer design /
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Microelectronic applications of chemical mechanical planarization /
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Li, Yuzhuo
2008
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Smart material systems and MEMs : design and development methodologies /
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Nano and giga challenges in microelectronics /
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Greer, Jim
2003
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Fundamentals of microfabrication : the science of miniaturization /
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Principles of lithography /
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Microelectronics, microsystems and nanotechnology : papers presented at MMN 2000 Athens, Greece 20-22 November 2000 : [First Conference on Microelectronics, Microsystems and Nanotechnology] /
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Electrochemical technology applications in electronics : proceedings of the Third International Symposium [on Electrochemical Technology Applications in Electronics during October 20 - 22, 1999 in Honolulu, Hawaii, as a part of the joint meeting of the Electrochemical Societies between USA and Japan ...] /
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Ferroelectric memories /
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Indo-German Workshop on Microelectronics. 2 : Suraj Kund, New Delhi, December, 7th - 8th, 1995 [E-Book] /
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Indo-German Workshop on Microelectronics. 2 : Suraj Kund, New Delhi, December, 7th - 8th, 1995 /
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Characterization and metrology for ULSI technology : 1998 international conference Gaithersburg, Maryland [23. - 27.] March 1998 : [the 1998 International Conference on Characterization and Metrology for ULSI Technology] /
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Chemical mechanical planarization of microelectronic materials /
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Mikroelektronik. 1. Prinzipien, Bauelemente und Werkstoffe der Siliziumtechnologie /
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Silicon processing for the VLSI era. 3. The submicron MOSFET.
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The Physics of micro/nano-fabrication /
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German Greek Workshop on Materials Research for Information Technology. 3 : proceedings, Thessaloniki, September 26-27, 1991 /
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Kaiser, G.
1992
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Prozesstechnologie : Fertigungsverfahren für integrierte MOS-Schaltungen /
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Analysis of microelectronic materials and devices.
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