ZB 31 IBN-1-2 9 IFF 1 IKP 1 PTJ 1

Board, K. 3 Morgan, D. V. 3 Campbell, S. A. 2 Hoppe, Bernhard. 2 Kasper, Erich. 2 Mader, H. 2 more ... Paul, D. J. 2 Ruge, I. 2 Sze, S. M. 2 Adam, Douglas J. 1 Bean, Kenneth E. 1 Beneking, H. 1 Broussard, Phillip R. 1 Cockrum, Richard H. 1 Deal, Michael D. 1 Einspruch, Norman G. 1 Finkenzeller, Klaus. 1 Francombe, Maurice H. 1 Friedrich, Harald. 1 Gail, Lothar 1 Griffin, Peter B. 1 Harper, Charles A. 1 Harth, W. 1 Herring, Robert B. 1 Hori, Takashi 1 Hunt, Lee P. 1 Hunter, Lloyd P. 1 Kern, Werner. 1 Krimmel, Eberhard F. 1 MacGuire, G. E. 1 see all ... less ...

microfabrication (for microelectronics only) 10 semiconductor device 8 microelectronics 6 silicon 5 semiconductor processing 4 thin film technology 4 more ... MOS transistor 3 VLSI technology 3 field effect transistor 3 chemical vapor deposition 2 diode 2 epitaxy 2 integrated circuit 2 ion implantation 2 microtechnology 2 optoelectronics 2 semiconductor physics 2 solar cell 2 solid state device 2 III - V semiconductor 1 MIS transistor 1 SQUID (superconducting quantum interference device) 1 ULSI (ultra large scale integration) 1 VLSI (very large scale integration) 1 application 1 characterization 1 clean room 1 cleaning 1 diffusion 1 electric contact 1 see all ... less ...

English 4 German 1