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Lüth, H. AND van der Hart, A.

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Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik

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Lüth, H. AND van der Hart, A.

Publications database

Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik

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Journal Article 4 Conference Presentation 3 Poster 2 Contribution to a book 1 Contribution to a conference proceedings 1

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Journal Article

Patterning of 25nm wide Silicon Ridges for vertical Double-Gate MOSFETs

Trellenkamp, S.
2003

Verhandlungen der Deutschen Physikalischen Gesellschaft, 38 (2003) S. 5

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Conference Presentation

Influence of doping concentration on DC and RF performance of AlGaN/GaN HEMTs on silicon substrate

Marso, M.
2003

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Journal Article

Patterning of 25-nm-wide silicon webs with an aspect ratio of 13

Trellenkamp, S.
2003

Microelectronic engineering, 67-68 (2003) S. 376 - 380

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Contribution to a book
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Process steps for a double gate MOSFET with vertical layout

Trellenkamp, S.
2002

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Conference Presentation

Process steps for a double gate MOSFET with vertical layout

Trellenkamp, S.
2002

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Patterning of 25 nm wide silicon webs with an aspect ratio of 13

Trellenkamp, S.
2002

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Conference Presentation

Herstellung von Siliziumstegen im Dekananometerbereich

Trellenkamp, S.
2002

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Journal Article

Submicrometer scale photoassisted wet etching of n-doped gallium nitride

Skriniarova, J.
2002

Journal of electrical engineering, 53 (2002) S. 105 - 107

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Journal Article

Top contact for vertical double-gate MOSFETs

Moers, J.
2002

Microelectronic engineering, 64 (2002) S. 465 - 471

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Top contact for vertical double-gate MOSFETs

Moers, J.
2002

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Journal Article 4 Conference Presentation 3 Poster 2 Contribution to a book 1 Contribution to a conference proceedings 1

Kordos, P. 10 Lüth, H. van der Hart, A. Moers, J. 8 Trellenkamp, Stefan 8 Marso, M. 3 more ... Goryll, M. 2 Hogg, S. 2 Mantl, S. 2 Bernat, P. F. 1 Bochem, H. P. 1 Dikme, Y. 1 Fox, P. T. 1 Heuken, M. 1 Jansen, R. H. 1 Javorka, P. 1 Kalisch, H. 1 Schineller, B. 1 Schäfer, C. 1 Skriniarova, J. 1 Steffen, A. 1 Wolter, M. 1 see all ... less ...

Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik

Institut für Halbleiterschichten und Bauelemente; ISG-1 10

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