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Lüth, H.
AND Moers, J.
AND Trellenkamp, Stefan
AND van der Hart, A.

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Lüth, H.
AND Moers, J.
AND Trellenkamp, Stefan
AND van der Hart, A.

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Conference Presentation 3 Journal Article 3 Poster 2 Contribution to a book 1 Contribution to a conference proceedings 1

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Journal Article

Patterning of 25-nm-wide silicon webs with an aspect ratio of 13

Trellenkamp, S.
2003

Microelectronic engineering, 67-68 (2003) S. 376 - 380

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Journal Article

Patterning of 25nm wide Silicon Ridges for vertical Double-Gate MOSFETs

Trellenkamp, S.
2003

Verhandlungen der Deutschen Physikalischen Gesellschaft, 38 (2003) S. 5

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Contribution to a book
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Process steps for a double gate MOSFET with vertical layout

Trellenkamp, S.
2002

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Conference Presentation

Process steps for a double gate MOSFET with vertical layout

Trellenkamp, S.
2002

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Patterning of 25 nm wide silicon webs with an aspect ratio of 13

Trellenkamp, S.
2002

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Conference Presentation

Herstellung von Siliziumstegen im Dekananometerbereich

Trellenkamp, S.
2002

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Journal Article

Top contact for vertical double-gate MOSFETs

Moers, J.
2002

Microelectronic engineering, 64 (2002) S. 465 - 471

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Top contact for vertical double-gate MOSFETs

Moers, J.
2002

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Conference Presentation

Nanostrukturierung und optische Lithographie mit DUV-Photoresists bei der Herstellung vertikaler MOSFETs

Trellenkamp, S.
2001

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Publications database 9

Conference Presentation 3 Journal Article 3 Poster 2 Contribution to a book 1 Contribution to a conference proceedings 1

Kordos, P. 9 Lüth, H. Moers, J. Trellenkamp, Stefan van der Hart, A. Marso, M. 3 more ... Goryll, M. 2 Hogg, S. 2 Mantl, S. 2 Flücken, R. 1 see all ... less ...

Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik 8 Halbleiterbauelemente und Analytik 1 Halbleiterschichtsysteme und Mesoskopische Strukturen 1 Ionen- und Lithographietechnik 1

Institut für Halbleiterschichten und Bauelemente; ISG-1 9 Institut für Bio- und Chemosensoren; ISG-2 1

2002 6 2003 2 2001 1

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