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Elektrokeramische Materialien; IFF-EKM
Böttger, U.
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Ellerkmann, U.
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Elektrokeramische Materialien; IFF-EKM
Böttger, U.
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Ellerkmann, U.
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Conference Presentation
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1
Conference Presentation
Interface related thickness dependence of the tunability in ferroelectric perovskite thin films
Ellerkmann, U.
2003
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2
Conference Presentation
Influence of asymmetric oxide electrode structures on the interface capacity and the failure mechanisms in PZT thin films
Ellerkmann, U.
2003
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3
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Scaling of Pb(Zr,Ti)O3 thin films by the CSD method with a thickness down to 50 nm and nanosized top electrodes
Ellerkmann, U.
2003
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4
Conference Presentation
Non-linear imprint behavior of PZT thin films
Schorn, P.
2003
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5
Conference Presentation
Influence of asymetric electrode structures including SrO and IrO on the interfacial capacitance and the failure mechanisms in PZT thin films
Ellerkmann, U.
2003
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6
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Influence of electrode material on the interfacial capacitance and the failure mechanisms in PZT thin films
Ellerkmann, U.
2002
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6
Document Type
Conference Presentation
4
Poster
2
Name
Böttger, U.
Ellerkmann, U.
Waser, R.
6
Schorn, P.
3
Bolten, D.
2
Schneller, T.
2
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Bruchhaus, R.
1
Nagel, D. R.
1
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Research Program
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
6
Contributing Institute
Elektrokeramische Materialien; IFF-EKM
Scientific Report
2003
5
2002
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