JuLib | Articles & more - {"Hoffmann-Eifert, S."}

1

Journal Article

High temperature conductance characteristics of LaAlO3/SrTiO3-heterostructures under equilibrium oxygen atmospheres

Gunkel, F.
2010

Applied physics letters, 97 (2010) S. 012103

“...Hoffmann-Eifert, S....”
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2

Conference Presentation

High temperature conductance of LaAlO3/SrTiO3-heterostructures under equilibrium oxygen atmospheres

Gunkel, F.
2010

“...Hoffmann-Eifert, S....”

3

Poster

High temperature conductance characteristic of LaAlO3/SrTiO3-heterostructures under changing pO2

Gunkel, F.
2010

“...Hoffmann-Eifert, S....”

4

Journal Article

SrTiO3 ultra thin film capacitors on silicon substrates with significant interfacial passive layers

Schmelzer, S.
2010

Applied physics letters, 97 (2010) S. 132907

“...Hoffmann-Eifert, S....”
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5

Journal Article

Liquid injection atomic layer deposition of crystalline TiO2 thin films with a smooth morphology from Ti(O-i-Pr)2(DPM)2

Kim, S. K.
2009

Journal of the Electrochemical Society, 156 (2009) S. D296 - D300

“...Hoffmann-Eifert, S....”

6

Journal Article

Growth of noble metal Ru thin films by liquid injection atomic layer deposition

Kim, S. K.
2009

The @journal of physical chemistry / C, 113 (2009) S. 11329

“...Hoffmann-Eifert, S....”

7

Conference Presentation

Strontium ruthenate (SRO) - strontium titanate (STO) thin film capacitor by RF sputtering for DRAM application

Schmelzer, S.
2009

“...Hoffmann-Eifert, S....”

8

Conference Presentation

Liquid injection atomic layer deposition of metallic Ru thin films from Ru(tmhd)3 and of high-k TiO2 thin films from Ti(O-i-Pr)2(tmhd)2

Hoffmann-Eifert, S.
2009

“...Hoffmann-Eifert, S....”

9

Conference Presentation

Liquid injection atomic layer deposition of lead zirconate titanate thin films for three dimensional ferroelectric capacitor structures

Hoffmann-Eifert, S.
2009

“...Hoffmann-Eifert, S....”

10

Conference Presentation

Liquid injection atomic layer deposition of metallic Ru and RuO2 thin films for electrode applications

Hoffmann-Eifert, S.
2009

“...Hoffmann-Eifert, S....”

11

Conference Presentation

Dielektrische Materialien für die Halbleitertechnik

Hoffmann-Eifert, S.
2009

“...Hoffmann-Eifert, S....”

12

Conference Presentation

Influence of strain relaxation and atomic interface configuration on the dielectric response of BST thin film capacitors

Dittmann, R.
2008

“...Hoffmann-Eifert, S....”

13

Conference Presentation

Influence of strain relaxation and atomic interface configuration on the dielectric response of BST thin film capacitors

Dittmann, R.
2008

“...Hoffmann-Eifert, S....”

14

Conference Presentation

Liquid injection atomic layer deposition (LI-ALD) of ferroelectric oxide Pb(Zr,Ti)O3 films and metallic Ru thin films

Hoffmann-Eifert, S.
2008

“...Hoffmann-Eifert, S....”

15

Journal Article

Growth behavior of atomic-layer-deposited Pb(Zr,Ti)Ox thin films on planar substrate and three-dimensional hole structures

Watanabe, T.
2008

Journal of the Electrochemical Society, 155 (2008) S. D715

“...Hoffmann-Eifert, S....”

16

Poster

Ferroelectric Pb(ZrxTi1-x)O3 thin films grown by liquid injection ALD into three dimensional capacitor structures

Hoffmann-Eifert, S.
2008

“...Hoffmann-Eifert, S....”

17

Conference Presentation

Towards a better understanding of the dielectric collapse in high-K BST thin film capacitors

Dittmann, R.
2008

“...Hoffmann-Eifert, S....”

18

Poster

Atomic Layer Deposition of RuO2 Thin Films

Kim, S. K.
2008

“...Hoffmann-Eifert, S....”

19

Conference Presentation

Liquid Injection Atomic Layer Deposition of Perovskite-type Multi-component Oxide Thin Films for Three Dimensional Ferroelectric Capacitor Structures

Hoffmann-Eifert, S.
2008

“...Hoffmann-Eifert, S....”

20

Conference Presentation

Beyond CMOS: Integration of Electroceramic Thin Films

Hoffmann-Eifert, S.
2007

“...Hoffmann-Eifert, S....”

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