JuLib | Articles & more - {"Hoffmann-Eifert, S."}

High Growth Rate in Atomic Layer Deposition of TiO$_{2}$ thin films by UV Irradiation

Kim, Seong Keun
2011

Electrochemical and solid-state letters, 14 (2011) 4, S. H146 -

“...Hoffmann-Eifert, Susanne...”

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162

Nanostructured resistive memory cells based on 8-nm-thin TiO2 films deposited by atomic layer deposition

Kügeler, C.
2011

Journal of vacuum science & technology / A, 29 (2011) S. 01AD01

“...Hoffmann-Eifert, S....”

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Select result number 163

163

Atomic layer deposition of TiO2-x thin films for resistive switching devices

Reiners, M.
2011

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164

Comparison of the resistance switching behavior in Nb2O5 thin films grown by atomic layer deposition and sputtering

Aslam, N.
2011

“...Hoffmann-Eifert, S....”

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Select result number 165

165

High temperature conductance characteristics of LaAlO3/SrTiO3-heterostructures under equilibrium oxygen atmospheres

Gunkel, F.
2010

Applied physics letters, 97 (2010) S. 012103

“...Hoffmann-Eifert, S....”

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Select result number 166

166

High temperature conductance of LaAlO3/SrTiO3-heterostructures under equilibrium oxygen atmospheres

Gunkel, F.
2010

“...Hoffmann-Eifert, S....”

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167

High temperature conductance characteristic of LaAlO3/SrTiO3-heterostructures under changing pO2

Gunkel, F.
2010

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168

SrTiO3 ultra thin film capacitors on silicon substrates with significant interfacial passive layers

Schmelzer, S.
2010

Applied physics letters, 97 (2010) S. 132907

“...Hoffmann-Eifert, S....”

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169

Strontium ruthenate (SRO) - strontium titanate (STO) thin film capacitor by RF sputtering for DRAM application

Schmelzer, S.
2009

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170

Liquid injection atomic layer deposition of metallic Ru thin films from Ru(tmhd)3 and of high-k TiO2 thin films from Ti(O-i-Pr)2(tmhd)2

Hoffmann-Eifert, S.
2009

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171

Liquid injection atomic layer deposition of crystalline TiO2 thin films with a smooth morphology from Ti(O-i-Pr)2(DPM)2

Kim, S. K.
2009

Journal of the Electrochemical Society, 156 (2009) S. D296 - D300

“...Hoffmann-Eifert, S....”

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Select result number 172

172

Growth of noble metal Ru thin films by liquid injection atomic layer deposition

Kim, S. K.
2009

The @journal of physical chemistry / C, 113 (2009) S. 11329

“...Hoffmann-Eifert, S....”

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173

Liquid injection atomic layer deposition of lead zirconate titanate thin films for three dimensional ferroelectric capacitor structures

Hoffmann-Eifert, S.
2009

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174

Liquid injection atomic layer deposition of metallic Ru and RuO2 thin films for electrode applications

Hoffmann-Eifert, S.
2009

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175

Dielektrische Materialien für die Halbleitertechnik

Hoffmann-Eifert, S.
2009

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176

Towards a better understanding of the dielectric collapse in high-K BST thin film capacitors

Dittmann, R.
2008

“...Hoffmann-Eifert, S....”

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Select result number 177

177

Ferroelectric Pb(ZrxTi1-x)O3 thin films grown by liquid injection ALD into three dimensional capacitor structures

Hoffmann-Eifert, S.
2008

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Select result number 178

178

Atomic Layer Deposition of RuO2 Thin Films

Kim, S. K.
2008

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Select result number 179

179

Liquid Injection Atomic Layer Deposition of Perovskite-type Multi-component Oxide Thin Films for Three Dimensional Ferroelectric Capacitor Structures

Hoffmann-Eifert, S.
2008

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Select result number 180

180