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Microelectronic engineering, 60 (2002) S. 191 - 196
...Kappius, L....
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Kluth, P.
2001
Microelectronic engineering, 55 (2001) S. 177
...Kappius, L....
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Nuclear instruments & methods in physics research / B, 164-165 (2000) S. 1004
...Kappius, L....
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Buchal, C.
2000
Journal of vacuum science & technology / A, 18 (2000) S. 630
...Kappius, L....
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Journal of applied physics, 87 (2000) S. 133 - 139
...Kappius, L....
OpenAccess 
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Buchal, C.
2000
Materials science in semiconductor processing, 3 (2000) S. 399
...Kappius, L....
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Fresenius' journal of analytical chemistry, 365 (1999) S. 282 - 285
...Kappius, L....
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