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Silicon-on-insulator technology : materials to VLSI /
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Silicon processing for the VLSI era. 1. Process technology /
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Symposium on VLSI technology 1994: digest of technical papers : VLSI technology symposium 1994: digest of technical papers : Honolulu, HI, 07.06.94-09.06.94.
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1994
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Principles of CMOS VLSI design : a systems perspective /
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Silicon on insulator technology : materials to VLSI.
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Novel silicon based technologies : NATO advanced study institute on novel silicon based technologies: proceedings : Boca-Raton, FL, 17.07.89-28.07.89.
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Silicon processing for the VLSI era. 2. Process integration.
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Semiconductor integrated circuit processing technology /
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Ieee sos/soi technology conference 1990 : Key-West, FL, 02.10.1990-04.10.1990.
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Dünnschichttechnologien 1990 : Statusseminar Vol 2 : 27.06.90-29.06.90 : Berichte zu F und E Projekten aus dem Förderbereich Physikalische Technologien des Bundesministers für Forschung und Technologie.
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Microelectronics processing: chemical engineering aspects /
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Ieee sos/soi technology conference. 1989: proceedings : State-Line, NV, 03.10.89-05.10.89.
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VLSI technology /
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Sze, S. M.
1988
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Silicon processing for the VLSI era. 1. Process technology /
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Frontiers in electronic materials and processing. 1, 32 : Topical conference on frontiers in electronic materials and processing : AVS national symposium : Houston, TX, 19.11.85-21.11.85.
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Advanced wafer technology : Semicon Europe : 1986: technical proceedings : Zürich, 04.03.1986-06.03.1986.
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1986
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Symposium on VLSI technology : 0006, 1986: digest of technical papers : San-Diego, CA, 28.05.1986-30.05.1986.
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An introduction to semiconductor microtechnology.
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Silicon materials.
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Symposium on VLSI technology. 1985: digest of technical papers : Kobe, 14.05.1985-16.05.1985.
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1985
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