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Ionentechnik

Bay, H. L.

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Ionentechnik

Bay, H. L.

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Journal Article 8 Poster 2 Contribution to a book 1 Contribution to a conference proceedings 1 Talk (non-conference) 1

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Talk (non-conference)

Formation of shallow junctions in Si-nanostructures

Hogg, S. M.
2001

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2

Journal Article

Epitaxial orientation of MBE grown Ru2Si3 films on Si(111) and Si(001)

Lenssen, D.
2000

Thin solid films, 368 (2000) S. 15

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Journal Article

Molecular beam epitaxy of Ru2Si3 on silicon

Lenssen, D.
2000

Thin solid films, 371 (2000) S. 66

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Journal Article

Structural, electrical and optical characterization of semiconducting Ru2Si3

Lenssen, D.
2000

Microelectronic engineering, 50 (2000) S. 243

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The influence of an epitaxial CoSi2 layer on diffusion of B and Sb in underlying Si during oxidation

Tyagi, A. K.
1999

Fresenius' journal of analytical chemistry, 365 (1999) S. 282 - 285

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Retarded diffusion of boron in Si due to the formation of an epitaxial CoSi2 layer

Kappius, L.
1999

Thin solid films, 336 (1999) S. 26

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Contribution to a book
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Growth, patterning and microelectronic applications of epitaxial cobalt-di-silicide

Mantl, S.
1999

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Strukturelle, elektrische und optische Charakterisierung halbleitender Ru2Si3-Schichten

Lenssen, D.
1999

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Structural electrical and optical characterization of semiconductor Ru2Si3

Lenssen, D.
1999

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Characteristic of surface and waveguide emitting SiGe:Er:O diodes

Sticht, A.
1999

Journal of luminescence, 80 (1999) S. 321

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Effect of an epitaxial CoSi2 layer on diffusion of B and Sb in Si during annealing and oxidation

Tyagi, A. K.
1999

Journal of applied physics, 85 (1999) S. 7639

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Growth and structural characterization of semiconducting Ru2Si3

Lenssen, D.
1999

Journal of luminescence, 80 (1999) S. 461

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Publications database 12 Open Access 1

Journal Article 8 Poster 2 Contribution to a book 1 Contribution to a conference proceedings 1 Talk (non-conference) 1

Bay, H. L. Mantl, S. 11 Lenssen, D. 6 Guggi, D. 5 Carius, R. 4 Kappius, L. 4 more ... Becker, J. S. 3 Breuer, U. 3 Dieker, C. 3 Mesters, S. 3 Tyagi, A. K. 3 Dietze, H.-J. 2 Lenk, Steffi 2 Abstreiter, G. 1 Antons, A. 1 Brunner, P. C. 1 Buchal, C. 1 Dolle, M. 1 Heinig, K. H. 1 Hogg, S. M. 1 Holzbrecher, H. 1 Kabius, B. 1 Klinkhammer, F. 1 Luigart, A. 1 Löken, M. 1 Moers, J. 1 Neufeld, E. 1 Rije, E. 1 Sticht, A. 1 Trellenkamp, Stefan 1 see all ... less ...

Ionentechnik Methodenentwicklung zur massenspektrometrischen Tiefenprofilanalyse von Oberflächen 2 Grundlagen und Technologie von Dünnschichtsolarzellen 1

Institut für Schicht- und Ionentechnik; ISI 11 Zentralabteilung für Chemische Analysen; ZCH 2 Institut für Halbleiterschichten und Bauelemente; ISG-1 1 Institut für Photovoltaik; IPV 1

1999 7 2000 4 2001 1

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